DOI: 10.14704/NQ.2022.20.11.NQ66030
Design and Optimization of BAW Resonator for Biomedical Applications
Poorvi K. Joshi, Meghana A. Hasamnis
Abstract
MEMS devices have found a broad usage in biomedical field. Remote handling of biomedical data of
implantable requires wireless transmission. The radiofrequency (RF) filter plays an important role in
wireless communication. In this paper, an optimized MEMS resonator is designed. The design and
optimization of SMR resonator utilizes piezoelectric thin-film material viz. AlN, ZnO, PZT, BaTiO3 and
LiNbO3. Each of them is appropriate for RF filters due to their distinct material characteristics. For
low noise and extremely sensitive communication systems require high Q factors. By evaluating the
various piezoelectric materials, the Quality factor of SMR resonator is calculated. The performance of a SMR in relation to the stages of Bragg's reflector arrangement and its material is studied. W/SiO2-based Bragg's reflector configurations based on AlN gives good performance in terms of Quality factor.
Keywords
MEMS, Piezoelectric, SMR, BAW, Quality Factor
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